Saint-Gobain Abrasive Particles
Industrial Lapping and Polishing Slurries

NanoSic Polishing Slurry, 9272

Product Code 9272

Saint-Gobain's NanoSiC Slurry is an aqueous slurry of hexagonal 6H structure SiC crystals in which the fundamental crystal size is 100 - 200 nanometers.  This synthetic NanoSiC abrasive has outstanding hardness to maximize cutting rates while reducing the subsurface damage layer on work pieces, when compared to harder abrasives like diamond, cBN or B4C.  The chemical inertness to most acids and bases in combination with its excellent heat and abrasion resistance makes SiC very suitable for extreme polishing conditions.

 

9272 NanoSic particles have demonstrated their effectiveness in polishing of wafers used in semiconductor and compound semiconductor applications.  These highly engineered particles are designed to be compatible with most water and emulsion based chemistries, which makes them very user friendly and adaptable to complex slurry formulations.  9272 has successfully proven that it can polish sapphire wafers of different orientations and can serve as a highly efficient polishing abrasive to a broad range of other materials in metals, crystals, and ceramics.

 

Nano SiC Slurry shows best results in CMP polishing of silicon, sapphire and SiC wafers.  It is also suitable for other ceramic based substrates.

  • High purity NanoSiC slurries
  • Readily available in commercial quantities
  • Provides fast MRR and controlled surface finish
  • Does not recrystallize like colloidal silica
  • Can be recirculated to maximize life
  • Tightly controlled particle size distribution and oversized particles
  • Easy to clean with commercially available alkaline cleaners