Saint-Gobain Abrasive Particles
Product Categories
Nano Slurries

Nano Polycrystalline Alumina Slurry, 92930.10MIC

Nano Slurries

Product Code: 92930.10MIC

Saint-Gobain Ceramic Materials' Third Generation Polycrystalline Alumina Polishing Particles are well dispersed, high purity seeded gel alumina in which the fundamental crystal size is less than 75 nanometers.  The unique composition of extremely small alpha alumina crystals results in an extremely cost-effective, rapid polishing abrasive for slurry formulations in sensitive electronics applications.

 

Nano Slurries, 9293Intended for CMP slurries, the 92930.10MIC particles have high purity and superior dispersion than previous generations.  Utilizing the latest particle processing technology, large particle counts are controlled to significantly lower defectivity rates on polished surfaces.

 


Applications

  • Intended for CMP slurries
  • High purity alpha Al2O3 slurries
  • Provide fast MRR and controlled surface finish
  • Does not re-crystallize like colloidal silica
  • Can be re-circulated to maximize life
  • Tightly controlled particle size distribution and oversized particles
  • Manufactured at high volume for semiconductor CMP applications
  • Particle undergoes rigid SPC during manufacturing, consistent with semiconductor industry standards
  • Particles have complete traceability back to raw materials
  • Particle provides superior removal rate and planarization efficiency vs. colloidal silica and other abrasive particles
  • State-of-the-art QC to assure consistent performance
  • ISO 14000 Certified
  • Ability to customize products for specialized applications
  • Knowledgeable application engineers available for technical support