Saint-Gobain Abrasive Particles
Nano Slurries

NanoSiC Polishing Slurry, 9272

Nano Slurries

Product Code: 9272

Saint-Gobain Ceramic Materials' NanoSiC Slurry is an aqueous slurry of hexagonal 6H structure SiC crystals in which the fundamental crystal size is 100 - 200 nanometers.  This synthetic NanoSiC abrasive has outstanding hardness to maximize cutting rates while reducing the subsurface damage layer on work pieces when compare to harder Nano Slurries 9279, SEMabrasives like diamond, CBN or B4C.

 

The chemical inertness to most acids and bases in combination with its excellent heat and abrasion resistance makes SiC very suitable for extreme polishing conditions.

 

9272 NanoSic particles have demonstrated their effectiveness in polishing of wafers used in semiconductor and compound semiconductor applications.  These highly engineered particles are designed to be compatible with most water and emulsion based chemistries, which makes them very user friendly and adaptable to complex slurry formulations. 

 

9272 has successfully proven that it can polish sapphire wafers of different orientations and can serve as a highly efficient polishing abrasive to a broad range of other materials in metals, crystals, and ceramics.

 


Applications

  • CMP polishing of silicon, sapphire and SiC wafers
  • Also suitable for other ceramic based substrates

 

  • High purity NanoSiC slurries
  • Readily available in commercial quantities
  • Provides fast MRR and controlled surface finish
  • Can be re-circulated to maximize life
  • Tightly controlled particle size distribution and oversized particles
  • ISO Certified to always bring consistency to Quality
  • Ability to customize products for any specialized applications
  • Easy-to-clean with commercially available alkaline cleaners
  • Knowledgeable application engineers available for technical support